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US 6,607,415 B2Granted
Method for fabricating tiny field emitter tips
AssigneeHewlett-Packard Development Company, L.P.
InventorsJohn Stephen Dunfield, Donald J. Milligan, Paul H. McClelland
Life of this patent
Estimating the term…
Abstract
A method for fabricating tiny field emitter tips across the surface of a substrate. A substrate is first exposed to reactive molecular, ionic, or free radical species to produce nanoclusters within a thin surface layer of the substrate. The substrate may then be thermally annealed to produce regularly sized and interspaced nanoclusters. Finally, the substrate is etched to produce the field emitter tips.
Claims18
A method for producing tiny field emitter tips across the surface of a substrate, the method comprising:
- exposing the substrate to an active chemical species in order to create nanoclusters within a surface layer of the substrate;
- and
- etching the substrate to create the tiny field emitter tips across the surface of the substrate.
Dependencies are inferred from the claim text.