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US 6,607,365 B1Granted
Vacuum pump and vacuum apparatus
AssigneeSeiko Seki Kabushiki Kaisha
InventorsTakashi Kabasawa, Takashi Okada, Manabu Nonaka
Life of this patent
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Abstract
A vacuum pump capable of controlling a gas sucking performance is provided. A conductance variable mechanism (50) is arranged at an inlet port (16) formed inside a flange (11). The conductance variable mechanism (50) allows the area of a cross-section of the inlet port to be increased or decreased relative to the direction where gas is fed, so that an amount of gas to be sucked from the inlet port (16) can be controlled.
Claims11
A vacuum pump comprising:
- an inlet port for sucking gas;
- a gas feeding portion for feeding gas sucked from the inlet port;
- an outlet port for discharging the gas to an outside fed by the gas feeding portion;
- a passage area increasing/decreasing mechanism for increasing/decreasing an area of a gas passage, provided at least one place from the inlet port to the outlet port;
- and
- a control means for controlling the passage area increasing/decreasing mechanism to increase/decrease the area of the gas passage.
3 more elements
Dependencies are inferred from the claim text.