Wire bonding apparatus
AssigneeNEC Corporation
InventorYasushi Toda
Life of this patent
Estimating the term…
Abstract
There is provided a wire bonding apparatus operated steadily at a high speed without excitation of vibrations of an XY stage 102 and a capillary 104, which are movable parts. The wire bonding apparatus is configured so as to have a composite target path generating section 208 for generating a target path 109, in which the deceleration part of a go path and the acceleration part of a return path are composed to one continuous path, for a path part of reciprocating movement of said target path indicating a motion process of either one or both of the XY stage and capillary.
Claims6
A wire bonding apparatus comprising an XY axis driving mechanism for driving an XY stage, a Z axis driving mechanism for driving a capillary, and controlling means to connect a wire between an electrode on a semiconductor chip and a package by controlling said XY stage and capillary so that they go along a target path specified in advance;
- wherein said apparatus further comprises a composite target path generating means for generating a composite target accelerating path as part of said target path for a reciprocating movement of either one or both of said XY stage and capillary;
- said composite target accelerating path including:
- a first wave, a second wave subsequent in time to said first wave and a third wave subsequent in time to said second wave;
- wherein the amplitude of said first and third waves project in a direction opposite of said second wave;
- said second wave being wider in width as to time scale than that of said first and third waves, such that the deceleration part of said composite target accelerating path in a go path of said reciprocating movement and the acceleration part of said composite target accelerating path in a return path of said reciprocating movement are one continuous path in said second wave.
A wire bonding apparatus comprising:
- an XY stage for movement in two dimensions;
- and
- a Z mechanism for movement in a third dimension;
- wherein:
- said XY stage and Z mechanism attach wire bonds between an integrated chip and packaging for the integrated chip in a reciprocating movement, said reciprocating movement including a first movement and a second movement;
- and wherein
- said reciprocating movement is represented by a sinusoidal waveform graphically displaying the amplitude of the velocity of the reciprocating movement against the time of the reciprocating movement;
- and in which
- the first movement and the second movement constitute three half-cycles of the sinusoidal waveform, said second half-cycle being of lesser frequency than either the first or third half-cycles and wherein said first movement ends its movement and said second movement begins its movement during said second half-cycle.
Dependencies are inferred from the claim text.