High purity coriolis mass flow controller

A mass flow measurement and control device, comprising:

• an enclosure;
• a Coriolis mass flowmeter situated in the enclosure, the Coriolis mass flowmeter including a flow-tube made of a high-purity plastic material, a driver coupled to the flow tube for vibrating the flow tube, and a pickoff coupled to the flow tube for sensing Coriolis deflections of the vibrating flow tube;
• and
• a pinch valve including an actuator having a ram operatively connected thereto situated adjacent the flow tube, and a reference surface positioned generally opposite the ram such that the flow tube is squeezable between the ram and the reference surface.

A Coriolis measurement and control device for controlling a process material flow, comprising:

• an enclosure;
• first means for measuring mass flow without transferring ions to the process material, the first means being situated in the enclosure;
• and
• second means for varying fluid flow without transferring unwanted ions to the process material, the second means in fluid communication with the first means;
• third means for controlling the second means in response to the first means.