Pressure sensors
AssigneeOMRON Corporation
InventorsMorito Akiyama, Masahiro Kinoshita, Hideyuki Bingo, Makoto Nakamura
Life of this patent
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Abstract
A pressure sensor is formed by sandwiching a pressure-sensitive dielectric membrane between and in contact with a pair of electrodes. As pressure is applied, the dielectric constant of the pressure-sensitive membrane changes while the distance of separation between the pair of electrodes remains constant. This change in the dielectric constant is detected by a circuit as a change in the electrostatic capacitance between the electrodes to measure the applied pressure. Since the pressure-sensitive dielectric membrane is not required to undergo any elastic deformation for measuring the pressure, the pressure sensor can be made extremely thin.
Claims19
A pressure sensor comprising:
- a pair of electrodes consisting of a first electrode and a second electrode;
- a single pressure-sensitive dielectric membrane sandwiched between and in contact with both of said pair of electrodes, said pressure-sensitive membrane having a dielectric constant which varies according to pressure;
- and
- means for measuring capacitance without changing distance between said pair of electrodes and thereby detecting pressure on said pair of electrodes.
A pressure sensor comprising:
- a pair of electrodes consisting of a first electrode and a second electrode;
- a pressure-sensitive dielectric membrane sandwiched between and in contact with both of said pair of electrodes, said pressure-sensitive membrane having a dielectric constant which varies according to pressure;
- and
- means for measuring capacitance without changing distance between said pair of electrodes and thereby detecting pressure on said pair of electrodes.
Dependencies are inferred from the claim text.