Method for manufacturing piezoelectric oscillator

A manufacturing method of a piezoelectric vibrator having a piezoelectric vibration plate formed with a piezoelectric vibration portion and a frame portion integrally connected with the piezoelectric vibration portion and surrounding the piezoelectric vibration portion, on respective surfaces of which a pair of lid members are bonded to hermetically seal the piezoelectric vibration portion without interfering with vibration of the piezoelectric vibration portion, comprising the steps of:

• forming a metal film over substantially entire opposite surfaces of the piezoelectric vibration plate and extending to an edge of the piezoelectric vibration plate;
• patterning the metal film to form oscillation electrode films on opposite surfaces of the piezoelectric vibration portion and to simultaneously form bonding films on opposite surfaces of the frame portion for bonding the frame portion to the pair of lid members;
• laminating the piezoelectric vibration plate and the pair of lid members through the bonding films by heating the bonding films to a temperature within the range of 100-200° C. and applying a voltage of 0.5-5.0 kV between the lid members and the bonding films with the piezoelectric vibration plate serving as an anode;
• and
• forming another metal film extending along an outer surface of one of the lid members and contacting one of the oscillation electrode films formed on the piezoelectric vibration portion to form an electrode.

A method of manufacturing a piezoelectric vibrator comprising the steps of:

• etching a piezoelectric substrate to form a piezoelectric vibration plate having at least one piezoelectric vibration member for undergoing vibration and a frame portion connected to the piezoelectric vibration member;
• forming oscillation electrode films on opposite surfaces of the piezoelectric vibration member of a patterned metal thin film for vibrating the piezoelectric vibration member, and at the same time forming bonding films on opposite surfaces of the frame portion of the patterned metal thin film for bonding the frame portion to a pair of lid members formed of soda-lime glass;
• and
• bonding the pair of lid members to opposite surfaces of the frame portion to hermetically seal the piezoelectric vibration member by placing the lid members on the opposite surfaces of the piezoelectric vibration plate with the bonding films disposed therebetween and heating the bonding films while applying a voltage between the lid members and the bonding films with the piezoelectric vibration plate serving as an electrode.

A method of manufacturing a piezoelectric vibrator comprising the steps of:

• etching a piezoelectric substrate to form a piezoelectric vibration plate having a piezoelectric vibration member for undergoing vibration and a frame portion connected to the piezoelectric vibration member;
• forming a metal film on opposite surfaces of the piezoelectric vibration plate to extend to an edge of the piezoelectric vibration plate;
• patterning the metal film to form oscillation electrode films on opposite surfaces of the piezoelectric vibration member and to simultaneously form bonding films on opposite surfaces of the frame portion;
• bonding a pair of lid members to opposite surfaces of the frame portion to hermetically seal the piezoelectric vibration member by placing the lid members on the opposite surfaces of the piezoelectric vibration plate with the metal film disposed therebetween and heating the metal film while applying a voltage between the lid members and the metal film with the piezoelectric vibration plate serving as an electrode;
• and
• forming another metal film extending along an outer surface of one of the lid members and contacting the metal film formed on the piezoelectric vibration member to form an electrode.