US 6,606,524 B1 · System and method for controlling an in-line apparatus

Abstract

Disclosed is an in-line apparatus system that comprises a plurality of sub-apparatuses, a host, a plurality of apparatus controllers, and a master controller. The sub-apparatuses perform predetermined jobs on the substrates. The host stores information on the substrate to be processed in the sub-apparatuses and information on jobs performed by the sub-apparatuses. The apparatus controllers respectively control substrate jobs in the sub-apparatuses according to the information on the substrates and jobs, and are interconnected through a network and share information on the substrates. The master controller, connected to the apparatus controllers, controls the apparatus controllers and receives job information of the sub-apparatuses from the apparatus controllers and transmits the job information to the host. The in-line apparatus system and its control method enable overall easy control and increase reliability.

Claims19

Dependent claims

An in-line apparatus system, comprising:

a plurality of sub-apparatuses, each sub-apparatus sequentially performing a predetermined job;
a host storing information on a substrate to be processed in the sub-apparatuses and information on jobs to be performed by the sub-apparatuses;
a plurality of apparatus controllers, each apparatus controller controlling the jobs to be performed on the substrate by the sub-apparatuses according to the information on the substrate and the information on the jobs, and each apparatus controller sharing the information on the substrate through a connection that allows data communications between each apparatus controller;
and
a master controller, connected to the apparatus controllers to control the apparatus controllers, the master controller receiving information on the jobs processed by the sub-apparatuses from the apparatus controllers and transmitting the information to the host, and transmitting to a corresponding apparatus controller the information on the substrate and the information on the jobs received from the host.

2 more elements

A method for controlling an in-line apparatus system, the system comprising a plurality of sub-apparatuses each sequentially performing predetermined jobs on a substrate, a plurality of apparatus controllers each controlling substrate jobs of the sub-apparatuses and connected to the sub-apparatuses to enable communications with the sub-apparatuses, and a host storing substrate information and job information to be performed by the sub-apparatuses, comprising the steps of:

(a) transmitting a message to the host through the apparatus controllers, the message indicating that the substrate has been loaded to a first sub-apparatus;
(b) receiving information on the substrate and job information of the first sub-apparatus from the host, and performing a job by the first sub-apparatus;
(c) conveying the substrate to a second sub-apparatus after the job is performed by the first sub-apparatus, and transmitting the information on the substrate processed by the first sub-apparatus from the apparatus controller of the first sub-apparatus to the apparatus controller of the second sub-apparatus;
and
(d) receiving information on the substrate received from the apparatus controller of the first sub-apparatus and information on the job of the second sub-apparatus received from the host, and controlling a job of the second sub-apparatus.

2 more elements

Dependencies are inferred from the claim text.

System and method for controlling an in-line apparatus

Life of this patent

System and method for controlling an in-line apparatus

Life of this patent

Abstract

Claims19