US 6,606,401 B1 · Inspection of edge periods of two-dimensional periodic structures

Abstract

A method for comparing periodic structures, such as wafer dies, by obtaining signals from the images of two swaths of the wafer dies. The signals for each wafer die are then compared to at least the signals from the two nearest neighbor dies. Preferably, these two neighbor dies are located on either side of the die, in the same row as that die. However, for edge dies, at least one neighbor die is located in another row, preferably an adjacent row. Since images are taken from an even number of swaths by the camera in a first row of dies before images are taken from a similar number of swaths in a second row of dies, the camera (and hence the resultant image) is correctly oriented for obtaining signals from the swaths in the second row of dies. This permits the correct comparison of signals obtained from the first swath of the first row of dies to signals obtained from the first swath of the second row of dies. Therefore, the images are correctly aligned, such that the comparison of the signals obtained from an edge die of the first row to the signals obtained from an edge die of the second row is accurate. Thus, the method enables defects at edge dies to be detected with no loss in throughput and with maximal detection sensitivity.

Claims6

Dependent claims

A method for inspecting a two-dimensional structure for a presence of a defect, the structure containing a plurality of periods, the structure having at least a first row of periods and a second row of periods, at least one border period of each row being an edge period, the method comprising the steps of:

(a) obtaining images of at least a first swath and a second swath in the first row by a scanning motion along said first swath and said second swath, respectively, such that an even number of swaths is obtained in the first row;
(b) obtaining an image of at least a first swath in the second row corresponding to said first swath of the first row, said first swath of the second row having a substantially identical orientation as said first swath of the first row;
and
(c) comparing a portion of said image corresponding to the edge period at the end of said first swath of the first row to a portion of said image corresponding to the edge period at the beginning of said first swath of the second row, such that at least a first neighboring comparison is performed for the edge period of the first row for said first swath.

1 more element

A method for inspecting at least a portion of a wafer of dies for a defect, the wafer having at least a first row of dies and a second row of dies, each of the first and second row of dies including at least a first die and a second die, the first die being an edge die for both the fist row of dies and the second row of dies, the steps of the method comprising:

(a) obtaining an image of a first swath of the first row of wafer dies by a scanning motion along said first swath, a width of said first swath being less than a width of the first row;
(b) obtaining an image of at least a second swath of the first row of wafer dies by a scanning motion along said second swath, an orientation of said first swath being opposite to an orientation of said second swath, such that images of an even number of swaths are obtained for the first row;
(c) obtaining an image of a first swath of the second row of wafer dies, said orientation of said image of the first swath of the first row and an orientation of said first swath of the second row being substantially identical;
(d) comparing a portion of said image corresponding to the edge die at the end of said first swath of the first row to a portion of said image corresponding to the preceding die of said first swath of the first row, such that a first neighboring comparison is performed for the edge die of the first row for said first swath;
and
(e) comparing said portion of said image corresponding to the edge die at the end of said first swath of the first row to a portion of said image corresponding to the edge die at the beginning of said first swath of the second row, such that a second neighboring comparison is performed for the edge die of the first row for said first swath for inspecting the edge die for the defect.

3 more elements

Dependencies are inferred from the claim text.

Inspection of edge periods of two-dimensional periodic structures

Life of this patent

Inspection of edge periods of two-dimensional periodic structures

Life of this patent

Abstract

Claims6