Liquid crystal display device and a manufacturing method thereof
AssigneeInternational Business Machines Corporation
InventorsShinji Takasugi, Mitsuru Ikezaki
Life of this patent
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Abstract
Disclosed is a manufacturing method of a liquid crystal display device that prevents luminance change in a sub-pixel where exposed portions overlap each other. A substrate is dividedly exposed in patterning a TFT array substrate of a liquid crystal display device. In an exposure process of using a resist, the substrate is divided into a plurality of divided regions. The portion subjected to a double exposure is set in a nonlinear manner within the sub-pixel. By providing such an arrangement, the portion subjected to double exposure is set so as not to overlap a storage capacitor or a signal line.
Claims11
A manufacturing method of a liquid crystal display device, in use of divisional exposure including dividing a substrate into the plurality of regions, defining overlapped exposed region containing a divisional boundary portion between the divided regions, and exposing said overlapped exposed region by reticles of which a portion corresponding to said overlapped exposed region has the exposed and unexposed patterns arranged alternately in checker fashion;
- said method comprising the steps of:
- patterning a pixel electrode for applying an electric field to liquid crystal;
- patterning wiring for transmitting an electric signal to said pixel electrode;
- and
- patterning a conducting portion forming a storage capacitor therewith said pixel electrode for the purpose of improving a retention characteristic of said liquid crystal,
- wherein, at least part of patterning processes step is performed by using said divisional exposure, and double exposure regions defined by a misalignment between the exposed patterns of two reticles positioned on said overlapped exposed region the substrate are set so as not to overlap at least a part of said wiring along said pixel electrode and extended in a direction of said wiring being extended, and
- at least part of said conducting portion patterning and said pixel electrode patterning steps are performed by using said divisional exposure, and said double exposure regions are set so as not to substantially overlap said storage capacitor and extended in a direction of said wiring being extended.
A liquid crystal display device, comprising:
- a pixel electrode for applying an electric field to liquid crystal;
- wiring for transmitting an electric signal to said pixel electrode;
- and
- a conducting portion forming a storage capacitor with said pixel electrode for the purpose of improving a retention characteristic of said liquid crystal,
- wherein at least part of a patterning processes is performed by uses divisional exposure, and double exposure regions defined by a misalignment between the exposed patterns of two reticles positioned on overlapped exposed region of the substrate are set so as not to overlap at feast a part of said wiring along said pixel electrode and extended in a direction of said wiring being extended, and
- at least part of said conducting portion patterning and said pixel electrode patterning are performed by using said divisional exposure, and said double exposure regions are set so as not to substantially overlap said storage capacitor and extended in a direction of said wiring being extended.
Dependencies are inferred from the claim text.