Image sensor with large radius micro-lenses
AssigneeSamsung Electronics Co., Ltd.
InventorSang-sik Kim
Life of this patent
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Abstract
A solid state image sensor having micro-lenses connected to each other by filling separations between trapezoidal separated sections of a protection layer with photoresist and a manufacturing method thereof comprises trapezoidal separated sections of the protection layer which is formed on a predetermined lower layer of a semiconductor substrate and convex micro-lenses having a predetermined radius of curvature that are connected to each other by filling the separations between the separated sections of the protection layer with photoresist.
Claims15
A solid state image sensor comprising:
- a lower layer on a semiconductor substrate;
- a flattening layer on the lower layer;
- a layer of color filters on the flattening layer;
- trapezoidal separated sections of a protection layer formed on the layer of color filters, the trapezoidal sections having top surfaces that are narrower than base surfaces thereof, the layer of color filters corresponding to the separated sections of the protection layer;
- and
- convex micro-lenses connected to each other by filling separations between the separated sections of the protection layer with photoresist, each micro-lens having a predetermined radius of curvature, and having a lens center that is positioned over a central region of the top surface of the trapezoidal section.
A solid state image sensor comprising:
- a flattening layer on a lower layer of a semiconductor substrate;
- a color filter on the flattening layer;
- a protection layer formed on to color filter;
- partitioning grooves formed in the protection layer, the grooves defining micro-lens positions;
- and
- convex micro-lenses formed on the protection layer at the micro-lens positions, the micro-lenses being connected to each other at the partitioning grooves, each of the micro-lenses having a radius of curvature, and having a lens center that is positioned on the protection layer at a position that is between adjacent partitioning grooves.
A solid state image sensor comprising:
- trapezoidal separated sections of a protection layer formed on a lower layer of a semiconductor substrate, the trapezoidal sections having top surfaces that are narrower than base surfaces thereof, wherein the protection layer is formed of a polyimide layer of a polyacryl series of a hybrid type;
- and
- convex micro-lenses connected to each other by filling separations between the separated sections of the protection layer with photoresist, each micro-lens having a predetermined radius of curvature, and having a lens center that is positioned over a central region of the top surface of the trapezoidal section, wherein the micro-lenses are formed of an organic Novolak resin.
Dependencies are inferred from the claim text.