MEMS analog frequency divider

A MEMS analog frequency divider structure, comprising:

• an elongate vibratory beam extending in a longitudinal axis between two clamped ends thereof,
• a piezoelectric transducer mechanically coupled to the beam and driven at a selected frequency to apply a longitudinal expansion force to the beam at that frequency thereby inducing a coherent vibration in a direction transverse to the longitudinal axis in the beam at a frequency substantially equal to an even sub-multiple of the selected frequency,
• a conductive layer covering at least a portion of the vibratory beam, and
• a conductive electrode positioned in proximity of the conductive layer to capacitively couple to the transverse vibration of the beam thereby generating an electrical signal at said even sub-multiple frequency.

A MEMS analog frequency divider, comprising

• at least two MEMS structures coupled to one another in series such that an output signal of one divider provides an input signal of the other divider, each divider receiving an input signal at a selected frequency and generating an output signal at a frequency equal to a fraction of the input frequency,
• each MEMS structure comprising
• an elongate vibratory beam having a longitudinal axis extending between two fixed ends,
• a piezoelectric transducer mechanically coupled to the vibratory element to periodically apply a longitudinal force at an input frequency to the vibratory element thereby inducing a vibration therein in a direction transverse to the longitudinal axis at an output frequency substantially equal to an even sub-multiple of the input frequency.