Method of forming a thin film transistor liquid crystal display

A method of fabricating a thin film transistor liquid crystal display (TFT-LCD) with a repair circuit, the method comprising the step of:

• providing a substrate, at least one transistor region for forming a thin film transistor (TFT) and at least one crossover region being on the substrate;
• forming a first metal layer on the substrate;
• patterning the first metal layer by removing a part of the first metal layer to form a gate electrode in the transistor area, a scan line passing through the crossover region and a first repair pad at either side of the crossover region simultaneously on the substrate;
• depositing a dielectric layer and a semiconductor layer sequentially on the substrate to cover the gate electrode, the scan line, and each first repair pad;
• forming an etching stop on the semiconductor layer, the etching stop being positioned above the gate electrode;
• depositing a doped semiconductor layer on the semiconductor layer and the etching stop;
• forming a second metal layer on the doped semiconductor layer;
• patterning the second metal layer, the doped semiconductor layer and the semiconductor layer by removing a part of the second metal layer, the doped semiconductor layer and the semiconductor layer to form a source electrode and a drain electrode and to define an active area of the thin film transistor in the transistor region and to form a signal line passing through the crossover region simultaneously;
• forming a passivation layer on the substrate;
• patterning the passivation layer by removing a part of the passivation layer positioned above the drain electrode to form a first via hole extending to the top surface of the drain electrode and a second via hole extending to the top surface of a first metal electrode in a peripheral area of the panel;
• forming a transparent conductive layer on the substrate to fill up the first via hole on the drain electrode;
• and
• patterning the transparent conductive layer by removing a part of the transparent conductive layer to form a pixel electrode electrically connected to the drain electrode via the first via hole and simultaneously form a second repair pad above each first repair pad, each first repair pad and the second repair pad form a repair circuit region.