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US 6,605,488 B1Granted
Layout technique for semiconductor processing using stitching
AssigneeMicron Technology, Inc.
InventorAnders Andersson
Life of this patent
Estimating the term…
Abstract
A technique and structure for simplifying the stitching process is disclosed. According to one aspect of the present system, a floor plan that minimizes the number of blocks for a two-dimensional stitching project is described. Another technique describes a special layout method for a row/column decoder that reduces the number of blocks when stitching.
Claims17
A method comprising:
- generically designing circuit blocks required on a reticle to pattern an image sensor;
- providing said circuit blocks on said reticle;
- repeatedly exposing said circuit blocks on said reticle onto a die so that circuit portions of the image sensor are patterned onto the die, the circuit blocks including at least one repeatable block;
- exposing the at least one repeatable block at least two times onto the die to form sub-blocks;
- appropriately stitching said sub-blocks to form combined blocks that operate properly as designed;
- interleaving address lines between sub-blocks to form row and column decoders;
- and
- forming address lines including at least one extra address line, to alternately address different blocks of said row and column decoders.
5 more elements
A photolithographic system comprising:
- a reticle having generically designed circuit blocks, said circuit blocks disposed on a reticle to be patterned as an image sensor, at least one of said circuit blocks being a repeatable block;
- a light beam source;
- and
- a die having a pattern of said image sensor formed on a surface of said die, said pattern formed by exposing said generically designed circuit blocks on said reticle to said light beam source, the repeatable block being exposed to said light beam source at least two times to form multiple blocks of the pattern on the die surface, and stitching the pattern blocks together, said stitching including interleaving connection lines between pattern blocks of row and column decoders.
1 more element
A device comprising:
- a semiconductor die having a pattern of an image sensor formed thereon, the image sensor pattern including at least two repeatable blocks interconnected with interleaved connection lines to form a greater block, the greater block selected from the group consisting of a row decoder and a column decoder row decoder.
A method comprising:
- providing a semiconductor die;
- providing a reticle having a repeatable block thereon;
- repeatedly directing a light source at the repeatable block to form at least two repeatable pattern blocks on the semiconductor die corresponding to the repeatable block;
- stitching the repeatable pattern blocks together, including
- interleaving connection lines between the repeatable pattern blocks;
- and
- forming circuit blocks of row and column decoders from the repeatable pattern blocks.
4 more elements
Dependencies are inferred from the claim text.