Method of forming magnetic layer pattern and method of manufacturing thin film magnetic head

A method of manufacturing a thin film magnetic head including a first magnetic layer and a second magnetic layer magnetically coupled to each other and having two magnetic poles which face each other, with a gap layer in between, in a recording-medium-facing surface, a thin film coil portion provided between the two magnetic layers, an insulating layer for insulating the thin film coil portion from the two magnetic layers, and a nonmagnetic layer and a third magnetic layer which are provided on the side opposite to the first magnetic layer with respect to the second magnetic layer, including:

• a first step of forming the third magnetic layer on a predetermined underlayer;
• a second step of forming a frame pattern having an opening with a predetermined shape on the third magnetic layer;
• a third step of forming a precursory nonmagnetic layer as a preparatory layer for the nonmagnetic layer and then forming a precursory magnetic layer as a preparatory layer for the second magnetic layer, so as to cover at least a region including the opening of the frame pattern;
• and
• a fourth step of forming the nonmagnetic layer and the second magnetic layer by polishing both the precursory nonmagnetic layer and the precursory magnetic layer until at least the frame pattern is exposed.

A method of manufacturing a thin film magnetic head including a first magnetic layer and a second magnetic layer magnetically coupled to each other and having two magnetic poles which face each other, with a gap layer in between, in a recording-medium-facing surface, a thin film coil portion provided between the two magnetic layers, an insulating layer for insulating the thin film coil portion from the two magnetic layers, and a nonmagnetic layer and a third magnetic layer which are provided on the side opposite to the first magnetic layer with respect to the second magnetic layer, including:

• a first step of forming a frame pattern having an opening with a predetermined shape on a predetermined underlayer;
• a second step of forming a first precursory magnetic layer as a preparatory layer for the third magnetic layer, then forming a precursory nonmagnetic layer as a preparatory layer for the nonmagnetic layer, and then forming a second precursory magnetic layer as a preparatory layer for the second magnetic layer, so as to cover at least a region including the opening of the frame pattern;
• and
• a third step of forming the third magnetic layer, the nonmagnetic layer and the second magnetic layer by polishing the first precursory magnetic layer, the precursory nonmagnetic layer and the second precursory magnetic layer until at least the frame pattern is exposed.