Oxide thin films and composites and related methods of deposition
AssigneeNorthwestern University
InventorsBruce W. Wessels, Brent H. Hoerman, Feng Niu
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Abstract
Thin oxide films are deposited on substrates by metal-organic molecular beam epitaxy (MOMBE) and can be incorporated into a variety of composite materials. The composites/films are characterized by a combination of transmission electron microscopy, Auger spectrometry and atomic force microscopy. Analyzes indicate that the films directly deposited on substrates are stoichiometric and phase-pure. Carbon contamination of the films resulting from precursor decomposition was not observed.
Claims19
A method of depositing a metal oxide layer on a substrate, said method comprising:
- providing a substrate;
- providing a solid metal-organic precursor compound;
- and
- depositing a film of metal oxide on said substrate by molecular beam epitaxy deposition, said metal oxide the oxidation product of said precursor compound and an oxygen source, said deposition substantially without substrate oxidation.
A composite comprising a substrate and a metal oxide film thereon, said composite substantially absent substrate oxidation, said oxide film substantially absent carbon contamination, said composite further including
- an epitaxial carbide layer between said substrate and said oxide film, said film produced by metal-organic molecular beam epitaxy deposition, said deposition under oxygen pressures less than about 10−3 Torr and a substrate temperature of less than about 1000° C.
Dependencies are inferred from the claim text.