Manufacturing method and apparatus for magnetic head sliders
AssigneeFujitsu Limited
InventorsYoshiaki Yanagida, Koji Sudo
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Abstract
Disclosed herein is a method including the steps of cutting a wafer to prepare a row block having a plurality of head elements arranged in a matrix, bonding a plate member to one side surface of the row block, bonding a row tool to another side surface of the row block bonded to the plate member opposite to the one side surface, and cutting the row block to prepare a row bar bonded to the row tool and having a row of the head elements. A bonding apparatus for realizing the above bonding steps is also disclosed.
Claims9
An apparatus for lapping a row bar having a plurality of head elements arranged in a row, comprising:
- a lap plate for providing a lapping surface;
- a row tool having a plurality of bend cells formed by a plurality of slits;
- a presser mechanism for pressing said row tool toward said lapping surface of said lap plate;
- and
- a compressed air source for supplying an air pressure to each of said bend cells.
A method of lapping a row bar having a plurality of head elements arranged in a row, comprising the steps of:
- providing a lapping surface by a lap plate;
- pressing said row bar bonded to a lower surface of a row tool having a plurality of bend cells formed by a plurality of slits, against said lapping surface;
- and
- applying individually adjustable air pressures to said bend cells, respectively;
- whereby said row bar is displaced at multiple points in lapping.
A row tool to which a row bar having a plurality of head elements arranged in a row is adapted to be bonded, comprising:
- a plurality of bend cells formed by a plurality of slits;
- a pair of fixed cells formed on the opposite sides of said bend cells, each of said fixed cells having a width larger than that of each of said bend cells;
- and
- a parallel spring mechanism.
A row tool assembly comprising:
- a row tool having an upper surface, a plurality of bend cells formed by a plurality of slits, a parallel spring mechanism, an insert hole extending horizontally, and a plurality of first holes communicating with said insert hole and opening to said upper surface;
- an air lead frame inserted in said insert hole of said row tool and having a plurality of air reservoirs respectively communicating with said first holes of said row tool;
- and
- an air plate fixed to said upper surface of said row tool and having a plurality of second holes respectively communicating with said first holes of said row tool.
Dependencies are inferred from the claim text.