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AssigneeCanon Kabushiki Kaisha
InventorShuji Yamada
Estimating the term…
A production method of an insulating layer includes a step of forming a first wire, a step of forming an insulating layer as a stack of M layers by repeatedly carrying out steps of laying and baking an insulating material on the first wire M times (M is an integer satisfying M≧3), and a step of forming a second wire on the insulating layer. An N-th insulating material used in formation of the N-th insulating layer (N is an integer satisfying 2≦N≦M−1) is baked at a temperature lower than a softening point of the N-th insulating material, and baking temperatures in formation of the (N+1)th to the M-th insulating layers are not more than the baking temperature in formation of the N-th insulating layer.
A method for producing an electron source substrate comprising a plurality of first wires, a plurality of second wires electrically insulated through insulating layers from said first wires, and a plurality of electron-emitting devices connected to said first wires and to said second wires, on a substrate, said method comprising the following steps:
An electron source substrate comprising:
A method for producing a wiring substrate in which a first wire and a second wire are laid through an insulating layer on a substrate, said method comprising the following steps:
A wiring substrate comprising:
A matrix wiring substrate comprising:
Dependencies are inferred from the claim text.