Actuator mechanism for precision alignment of optical components
OwnerMike Trzecieskiinventor
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Abstract
A multi axis optical component actuator mechanism is disclosed using a plurality of electromagnetic coil actuators and a plurality of magnetic stator assemblies for aligning an optical component in a plurality of axes. In the preferred embodiment the plurality of electromagnetic coils are rigidly coupled together to a carriage and the optical component. The carriage is free to move within a plurality of magnetic flux air gaps defined within a plurality of magnetic stator assemblies in response to a plurality of control signals having a magnitude and polarity. Advantageously the disclosed multi-axis optical component actuation mechanism has a high frequency response as well as inexpensive cost of manufacturing.
Claims26
An alignment mechanism for aligning a component to a second other component comprising:
- at least two magnetic stator assemblies, each comprising a magnetic stator for providing a magnetic flux;
- at least two electromagnetic coil assemblies, each comprising an electromagnetic coil for interacting with the magnetic flux, the electromagnetic coil assembly in spaced relation to the magnetic stator forming a gap therebetween;
- a carriage for supporting the component, the carriage mounted to a first of two assemblies from the at least two electromagnetic coil assemblies and the at least two magnetic stator assemblies;
- a control circuit for providing a control signal to the electromagnetic coil to displace it a controllably variable distance relative to the magnetic stator assembly;
- and,
- wherein the carriage is controllably variably movable in rotation about a first axis and translation along a plane approximately normal to the first axis and approximately parallel to a second other axis for aligning of the component to the second other component mounted to a second of two assemblies, other than the first of two assemblies, from the at least two electromagnetic coil assemblies and the at least two magnetic stator assemblies.
A method of positioning a component in a rotational direction about a first axis and in a translational direction parallel to a second other axis, comprising the step of:
- varying the intensity and polarity of a control signal applied to each of a pair of electromagnetic actuators having one of an electromagnetic coil and a magnetic stator assembly coupled to a same carriage at two different locations thereon to control the magnitude and direction of displacement of the carriage along the second other axis and to control the magnitude and direction of rotation of thc carriage about the first axis wherein the displacement and rotation is relative the other one of an electromagnetic coil and a magnetic stator assembly from the pair of electromagnetic actuators.
Dependencies are inferred from the claim text.