Slurry dilution system with an ultrasonic vibrator capable of in-situ adjustment of slurry concentration
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsBih-Tiao Lin, Meng-Feng Tsai, Rong Jye Jang, Kung-Teng Huang
Life of this patent
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Abstract
A slurry dilution system with an ultrasonic vibrator capable of diluting slurry in-situ to any desired level of concentration is proposed. Raw slurry and the de-ionized water fed into the slurry dilution system is mixed and homogenized by an ultrasonic vibrator and a mixer. The well-mixed slurry solution is then delivered to a chemical-mechanical polishing station. When the chemical-mechanical station requires slurry of a different concentration, the raw slurry can be diluted to the desired level simply by changing the rate of flow of de-ionized water into the dilution system.
Claims15
A slurry dilution system capable of diluting slurry in-situ to any desired level of concentration, the slurry dilution system comprising:
- a first pipeline having an inlet for feeding raw slurry into the slurry dilution system;
- a second pipeline having an inlet for feeding de-ionized water into the slurry dilution system;
- a first flow meter installed somewhere along the first pipeline for measuring a rate of flow for raw slurry;
- a second flow meter installed somewhere along the second pipeline for measuring a rate of flow for de-ionized water;
- a delivery pipeline having an inlet, wherein the delivery pipeline inlet is connected to both an outlet of the first pipeline and an outlet of the second pipeline, and a delivery pipeline outlet is connected to a chemical-mechanical polishing station;
- an ultrasonic vibrator installed near a first terminal of the delivery pipeline for mixing and homogenizing the raw slurry and the de-ionized water and preventing slurry particles from sticking on pipe walls and from clustering so that mixing efficiency is improved;
- and
- a mixer installed near a second terminal of the delivery pipeline for preventing the slurry particles from settling, wherein
- the delivery pipeline includes at least one turning region between the ultrasonic vibrator and the mixer, and a U-shape region at the first terminal directly connecting with the outlet of the first pipeline and the outlet of the second pipeline.
A slurry dilution system capable of in-situ dilution of slurry to any desired level of concentration, the slurry dilution system comprising:
- a first pipeline having an inlet for feeding raw slurry into the slurry dilution system;
- a second pipeline having an inlet for feeding de-ionized water into the slurry dilution system;
- a first flow meter installed somewhere along the first pipeline for measuring a rate of flow for raw slurry;
- a second flow meter installed somewhere along the second pipeline for measuring a rate of flow for de-ionized water;
- a U-shaped delivery pipeline having an inlet, wherein the inlet is connected to both an outlet of the first pipeline and an outlet of the second pipeline, and a delivery pipeline outlet connected to a chemical-mechanical polishing station;
- an ultrasonic vibrator installed next to the inlet of the U-shaped delivery pipeline for mixing and homogenizing the raw slurry and the de-ionized water and for preventing slurry particles from sticking on pipe walls and from clustering so that mixing efficiency is improved;
- and
- a mixer installed between the ultrasonic vibrator and the delivery pipeline outlet for preventing the slurry particles from settling.
A slurry dilution system capable of diluting slurry in-situ to any desired level of concentration, the slurry dilution system comprising:
- a first pipeline having an inlet for feeding raw slurry into the slurry dilution system;
- a second pipeline having an inlet for feeding de-ionized water into the slurry dilution system;
- a first flow meter installed somewhere along the first pipeline for measuring a rate of flow for raw slurry;
- a second flow meter installed somewhere along the second pipeline for measuring a rate of flow for de-ionized water;
- a delivery pipeline having an inlet, wherein the delivery pipeline inlet is connected to both an outlet of the first pipeline and an outlet of the second pipeline, and a delivery pipeline outlet is connected to a chemical-mechanical polishing station;
- an ultrasonic vibrator installed next to the inlet of the delivery pipeline for mixing and homogenizing the raw slurry and the de-ionized water and preventing slurry particles from sticking on pipe walls and from clustering so that mixing efficiency is improved;
- and
- a mixer installed between the ultrasonic vibrator and the delivery pipeline outlet for preventing the slurry particles from settling;
- wherein the delivery pipeline includes at least one turning region between the ultrasonic vibrator and the mixer.
Dependencies are inferred from the claim text.