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AssigneeSeiko Epson Corporation
InventorsYoshiaki Mori, Yasutsugu Aoki, Takuya Miyakawa
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A method and apparatus for solid bonding without using a bonding agent are provided. A surface of metal, glass, or other bond members 16a and 16b is fluorinated by exposure to a mixture of HF gas from a HF gas supply unit 24 and water vapor from a vapor generator 26 in a fluorination process section 12. The bond members 16a and 16b are then placed in contact at the fluorinated surface on table 36 in bonding process section 14. Argon is then introduced to bonding chamber 34. Pressure is then applied to the first bond member 16a and second bond member 16b by a cylinder 46, and heated to below the melting point by a heater 48, to bond the first and second bond members together.
A solid bonding method comprising the step of:
A manufacturing method for manufacturing a bonding agent disposed between a pair of solids for bonding said solids, comprising the steps of:
A manufacturing method for manufacturing a bonding agent disposed between a pair of solids for bonding said solids, comprising the steps of:
A manufacturing method for manufacturing a bonding agent disposed between a pair of solids for bonding said solids, comprising the step of:
Dependencies are inferred from the claim text.