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US 6,604,624 B2Granted
Work conveying system
AssigneeHirata Corporation
InventorsYasunari Hirata, Takenori Hirakawa, Akemichi Yamamoto
Life of this patent
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Abstract
A work conveying system for conveying works in a clean room includes a work holder for holding works, and a moving unit for moving the work holder.
Claims5
A work transfer system for transferring work in a clean room, comprising:
- a work holder for holding work,
- a guide rail;
- and
- a traveling unit traveling along said guide rail and supporting said work holder;
- said guide rail having a traveling space in which a slider of said traveling unit is accommodated and moves,
- said guide rail further having a suction passage in communication with said traveling space for drawing dust produced in said traveling space therethrough.
3 more elements
A work transfer system for transferring work in a clean room, comprising:
- a work holder for holding work,
- a pair of horizontal fixed guide rails disposed parallel to each other,
- at least one horizontal traveling guide rail extending between said fixed guide rails and traveling along said fixed guide rails, and
- a traveling unit traveling along said traveling guide rail and supporting said work holder,
- each of said fixed guide rails having a first traveling space in which a slider of said traveling guide rail is accommodated and moves and a first suction passage in communication with said first traveling space for drawing dust produced in said first traveling space therethrough,
- said traveling guide rail having a second traveling space in which a slider of said traveling unit is accommodated and moves and a second passage in communication with said second traveling space for drawing dust produced in said second traveling space through said first and second suction passages.
3 more elements
Dependencies are inferred from the claim text.