US 6,604,295 B2Granted

Microscopic geometry measuring device

AssigneeMitutoyo Corporation

InventorsKunitoshi Nishimura, Kazuhiko Hidaka, Kiyokazu Okamoto

Life of this patent

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Abstract

A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

Claims10

Dependent claims

A microscopic geometry measuring device, comprising:

a stylus to be in contact with a workpiece;
a sensor for detecting a quantitative change in state when the stylus is in contact with the surface of the workpiece;
a drive mechanism comprising a fine feed mechanism and a coarse feed mechanism for relatively moving the stylus and the workpiece in a direction substantially perpendicular to the surface of the workpiece;
a displacement sensor for detecting a relative movement of the stylus and the workpiece surface by the drive mechanism;
and
a measuring force control circuit for adjusting a measuring force applied to the stylus,
the drive mechanism fine feed mechanism having a fixed portion and a movable driving portion displacing relative to the fixed portion for minutely displacing the stylus and/or the workpiece;
and the drive mechanism coarse feed mechanism having a movable portion attached to the fixed portion of the fine feed mechanism for relatively displacing the stylus and the workpiece, the fine feed mechanism having a movable balancing portion structured approximately identical with the movable driving portion of the fine feed mechanism to be moved in a direction opposite to a movement direction of the movable driving portion, and the movement direction of the fine feed mechanism and the coarse feed mechanism is along an axial direction of the stylus,
wherein the measuring force control circuit actuates the fine feed mechanism and the coarse feed mechanism based on an output signal from the quantity of state sensor to adjust the measuring force applied to the stylus, and wherein the reaction force caused by movement of the fine feed mechanism on the coarse feed mechanism is minimized.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 09/805,309Filed 13 Mar 2001
Priority: JP 2000-07021614 Mar 2000
Published: US 2002/0124427 A112 Sep 2002
Granted: 12 Aug 2003
Term ends: Not estimatedThe source records don’t support an estimate.

Classification10 codes

G01Q 10/02
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe: coarse scanning or positioning
B82Y 35/00
Methods or apparatus for measurement or analysis of nanostructures
G01B 7/12
Measuring arrangements characterised by the use of electric or magnetic techniques: for measuring diameters
G01Q 10/04
Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe: fine scanning or positioning