Manufacturing method for a piezoelectric component
AssigneeTDK Corporation
InventorsSeiichi Tajima, Takahito Kiriyama
Life of this patent
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Abstract
A method for manufacturing a piezoelectric component in which a resonating portion on a piezoelectric substrate is provided with a deposit that is sensitive to radiation in a range of wavelengths from 350 to 2000 nm so as to have portions thereof trimmed away to form indentations therein without burning the deposit to avoid generating heat that is injurious to the piezoelectric component and substrate. A laser beam in the frequency range of 350 to 2000 nm is then caused to impinge on the deposit to cause the formation of trimmed indentations without substrate damaging heat in a controlled manner to adjust the resonance frequency of the piezoelectric component.
Claims5
A method for manufacturing a piezoelectric component that includes a piezoelectric substrate having at least one resonating part, comprising the steps of:
- adding a deposit of a resin containing a carbon filler at 0.1 to 20 wt % on a surface of the resonating part;
- generating laser beam radiation having a wavelength within a range of 350 to 2000 nm;
- and
- controlling the laser beam radiation to impinge on a front surface of said deposit and trim away portions of said deposit to form indented portions to adjust a resonance frequency of said piezoelectric component without any degradation in piezoelectric component characteristics due to laser beam radiation heating.
Dependencies are inferred from the claim text.