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US 6,603,892 B1Granted
Mechanical beam steering for optical integrated circuits
AssigneeLightwave Microsystems Corporation
InventorAnthony J. Ticknor
Life of this patent
Estimating the term…
Abstract
Optical circuits are disclosed having mechanical beam steering. The mechanical beam steering can mitigate thermal sensitivity of optical circuits, for example, arrayed waveguides. Also disclosed are methods for fabricating optical integrated circuits employing mechanical beam steering.
Claims23
An optical integrated circuit, comprising:
- a first region having a waveguide on a substrate having a first thermal expansion coefficient;
- a second region having a waveguide on a substrate having a second thermal expansion coefficient mechanically isolated from the first region to permit the first region and the second region to rotate about each other;
- a lens optically coupling the first region waveguide and the second region waveguide;
- and
- an expansion block located between the first region and the second region having a third thermal expansion coefficient, the expansion block positioned to rotate the first region relative to the second region in response to a temperature change,
- wherein the third thermal expansion coefficient is different from the first thermal expansion coefficient and the third thermal expansion coefficient is different from the second thermal expansion coefficient.
3 more elements
An optical integrated circuit, comprising:
- an input region having a waveguide;
- a grating region having a waveguide mechanically isolated from the input region to permit the input region and the grating region to rotate about each other;
- an input lens optically coupling the input region waveguide and the grating region waveguide;
- an output region having a waveguide mechanically isolated from the grating region to permit the output region and the grating region to rotate about each other;
- an output lens optically coupling the grating region waveguide and the output region waveguide;
- a first expansion block located between the input region and the grating region, the first expansion block positioned to rotate the input region relative to the grating region in response to a temperature change;
- and
- a second expansion block located between the output region and the grating region, the second expansion block positioned to rotate the output region relative to the grating region in response to a temperature change.
5 more elements
A method of making an optical integrated circuit, comprising:
- providing a base having at least one waveguide in an input region and at least one waveguide in a grating region;
- providing an input lens between the input region and the grating region;
- scroll dicing the input region from the grating region to mechanically isolate the grating region from the input region to permit the input region and the grating region to rotate about each other;
- and
- providing a first expansion block between the input region and the grating region, the first expansion block positioned to rotate the input region relative to the grating region in response to a temperature change.
2 more elements
A method of making an optical integrated circuit, comprising:
- providing a base having at least one waveguide in an input region and at least one waveguide in a grating region;
- providing an input lens between the input region and the grating region;
- separating the input region from the grating region beyond the input lens by patterned etching of the base to mechanically isolate the grating region from the input region to permit the input region and the grating region to rotate about each other;
- and
- providing a first expansion block between the input region and the grating region, the first expansion block positioned to rotate the input region relative to the grating region in response to a temperature change.
2 more elements
Dependencies are inferred from the claim text.