Pattern inspection method, pattern inspection apparatus, and recording medium which records pattern inspection program

A pattern inspection apparatus comprising:

• a first image data generator which generates first image data from a pattern image captured from a sample;
• a second image data generator which generates second image data by reducing the four sides of each pattern contained in the first image data by a predetermined width;
• a pattern number detector which detects a first pattern number that is the number of patterns contained in the first image data, and which also detects a second pattern number that is the number of patterns contained in the second image data;
• and
• a defect detector which detects a defect present in the patterns of the sample in accordance with a result of comparison between the first pattern number and the second pattern number.

A computer-readable recording medium in which a program is recorded, the program providing a computer with functions of:

• a first image data generator which generates first image data from a pattern image captured from a sample;
• a second image data generator which generates second image data by reducing the four sides of each pattern contained in the first image data by a predetermined width;
• a pattern number detector which detects a first pattern number that is the number of patterns contained in the first image data, and which also detects a second pattern number that is the number of patterns contained in the second image data;
• and
• a defect detector which detects a defect present in the patterns of the sample in accordance with a result of comparison between the first pattern number and the second pattern number.