Discharge-pumped excimer laser device

A discharge-pumped excimer laser device comprising:

• a casing filled with a laser gas;
• a pair of main discharge electrodes disposed in said casing for producing an electric discharge to discharge-pump the laser gas to emit a laser beam;
• a cross-flow fan for producing a high-speed laser gas flow between said main discharge electrodes, said cross-flow fan having a rotatable shaft projecting from opposite ends thereof;
• magnetic bearings, said rotatable shaft being rotatably supported in a non-contact manner by said bearings;
• protective bearings for supporting said rotatable shaft when said magnetic bearings are not in operation;
• and
• a motor for actuating said cross-flow fan;
• said magnetic bearings including radial magnetic bearings disposed respectively on the opposite ends of said cross-flow fan, said motor being disposed on an end of said rotatable shaft near one of said radial magnetic bearings, said one of the radial magnetic bearings having a bearing rigidity greater than the bearing rigidity of the radial magnetic bearing which is disposed remotely from said motor.