Gas detecting apparatus using laser absorption spectroscopy
AssigneeAnritsu Corporation
InventorsMasaya Nanami, Toshiyuki Suzuki, Takeshi Tsukamoto
Life of this patent
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Abstract
A gas detecting apparatus includes a gas cell, a laser source, a light diffuser and a photodetector. The gas cell has a gas inlet hole for letting the target gas come inside and a gas discharge hole for discharging the target gas, and retains a target gas to be detected. The laser source emits coherent light into the gas cell in order to detect a concentration of the target gas. The light diffuser is disposed in the optical path of the coherent light output from the laser source to diffuse the coherent light, thereby eliminating coherence of the coherent light. The photodetector receives light diffused by the light diffuser.
Claims12
A gas detecting apparatus comprising:
- a gas cell for retaining a target gas to be detected, said gas cell having a gas inlet opening for enabling the target gas to enter the gas cell and a gas discharge opening for discharging the target gas;
- a laser source for emitting coherent light into the gas cell in order to detect a concentration of the target gas;
- light diffusion means, disposed in an optical path of the coherent light output from the laser source, for diffusing the coherent light to thereby eliminate coherence of the coherent light;
- and
- a photodetector for receiving light diffused by the light diffusion means;
- wherein the gas cell includes a container for containing the target gas, a first window through which the light from the laser source can enter, and a second window from which the light from the laser source can emerge;
- wherein a contact portion between the container and each of the first and second windows of the gas cell has an air-tight structure;
- and
- wherein said light diffusion means comprises a light diffuser arranged between the laser source and the first window of the gas cell.
A gas detecting apparatus comprising:
- a gas cell for retaining a target gas to be detected, said gas cell having a gas inlet opening for enabling the target gas to enter the gas cell and a gas discharge opening for discharging the target gas;
- a laser source for emitting coherent light into the gas cell in order to detect a concentration of the target gas;
- light diffusion means, disposed in an optical path of the coherent light output from the laser source, for diffusing the coherent light to thereby eliminate coherence of the coherent light;
- and
- a photodetector for receiving light diffused by the light diffusion means;
- wherein the gas cell includes a container for containing the target gas, a first window through which the light from the laser source can enter, and a second window from which the light from the laser source can emerge;
- wherein a contact portion between the container and each of the first and second windows of the gas cell has an air-tight structure;
- and
- wherein said fast window comprises a transmission type light diffuser as said light diffusion means.
Dependencies are inferred from the claim text.