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US 6,603,119 B1Granted
Calibration method for quantitative elemental analysis
AssigneeAgere Systems Inc.
InventorsLucille A. Giannuzzi, Frederick A. Stevie, Catherine Vartuli
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Abstract
The present invention provides a method of calibrating an analytical tool. The method, in a illustrative embodiment, includes preparing a calibration standard having a known concentration of an element and obtaining a portion of the calibration standard with a focused beam, wherein the calibration standard is representative of the concentration. The portion of the calibration standard is then used to calibrate an analytical tool.
Claims23
A method of calibrating an analytical tool, comprising:
- preparing a calibration standard having a known concentration of an element;
- obtaining a layer of the calibration standard with a focused beam, the layer being representative of the concentration of the element;
- providing an analytical tool;
- and
- calibrating the analytical tool with the layer.
2 more elements
A system for calibrating an analytical tool, comprising:
- a first analytical tool capable of determining a concentration of an element located within a calibration standard;
- a focused bean apparatus;
- a layer extracted from the calibration standard with the focused beam apparatus, the layer being representative of the concentration of the element;
- a second analytical tool having a measurement limit of the element less than its concentration, the layer being used to calibrate the second analytical tool.
1 more element
Dependencies are inferred from the claim text.