Self contained sensing apparatus and system
AssigneeGreene, Tweed & Co.
InventorsChristopher Corrado, George Rawa, Carmin Quartapella, Timothy Edwards
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AssigneeGreene, Tweed & Co.
InventorsChristopher Corrado, George Rawa, Carmin Quartapella, Timothy Edwards
Estimating the term…
A self contained sensing apparatus includes a housing establishing an interior compartment, the housing having a maximum thickness which is less than the size of an access portal for inserting the housing into an area for sensing. The housing includes a window extending through a principal housing surface. A sensor is provided within the housing and generally aligned with the window for sensing at least one parameter. In a preferred embodiment, the sensor is an optical sensor for sensing images through the window. A transmitter is provided within the housing and coupled with the sensor for receiving signals representative of the sensed parameter and transmitting the signals out of the housing.
A self contained sensing apparatus for viewing the interior of a functioning semiconductor wafer processing chamber having a gate opening and a robot arm comprising:
Dependencies are inferred from the claim text.