Scanning head comprising a semiconductor substrate with a blind hole containing a light source
AssigneeJohannes Heidenhain GmbH
InventorsWolfgang Holzapfel, Elmar Mayer
Life of this patent
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Abstract
A scanning head is described, having on a side facing a scale at least one patterned photodetector, which is realized in a semiconductor substrate. The semiconductor substrate has an anisotropic blind hole that is symmetrical to the several photodetectors, and a light source arranged on a base plate in the blind hole. The transmitting grating for the light source is formed either in a metallization layer on the semiconductor substrate or, in the form of bars of the semiconductor substrate that have not been etched away. The distance between the scale and the transmitting grating as well as the distances between the scale and the patterned photodetector are essentially the same.
Claims28
A measuring system, comprising:
- a scale which carries a graduation;
- a scanning head including:
- a semiconductor substrate having a first side facing the scale;
- a plurality of photodetectors disposed on the first side of the semiconductor substrate, the photodetectors patterned and integrated in the semiconductor substrate;
- a hole formed in the semiconductor substrate, the hole edged on the first side by a transmitting grating symmetrically aligned with respect to the photodetectors;
- and
- a light source disposed on a side of the transmitting grating facing away from the scale.
A scanning head for scanning a scale which carries a graduation, the scanning head comprising:
- a semiconductor substrate having a first side facing the scale;
- a plurality of patterned photodetectors disposed on the first side;
- a blind hole formed in the semiconductor substrate;
- a transmitting grating disposed on the first side facing the scale, said transmitting grating being symmetrically aligned with respect to the patterned photodetectors;
- and
- a light source disposed on a side of the transmitting grating facing away from the scale;
- wherein the transmitting grating is composed of bars formed from the semiconductor substrate.
A scanning head for scanning a scale which carries a graduation, the scanning head comprising:
- a semiconductor substrate having a first side facing the scale;
- a plurality of patterned photodetectors disposed on the first side;
- a blind hole formed in the semiconductor substrate;
- a transmitting grating disposed on the first side facing the scale, said transmitting grating being symmetrically aligned with respect to the patterned photodetectors, the transmitting grating composed of metal bars formed from a metallization layer applied to the semiconductor substrate;
- a light source disposed on a side of the transmitting grating facing away from the scale;
- and
- an oxide layer disposed over the metallization layer, and a passivation layer arranged over an arrangement of an oxide layer and a metallization layer.
A scanning head for scanning a scale which carries a graduation, the scanning head comprising:
- a semiconductor substrate having a first side facing the scale;
- a plurality of patterned photodetectors disposed on the first side;
- a blind hole formed in the semiconductor substrate;
- a transmitting grating disposed on the first side facing the scale, said transmitting grating being symmetrically aligned with respect to the patterned photodetectors;
- a light source disposed on a side of the transmitting grating facing away from the scale;
- a base plate for holding the light source, said base plate being disposed on a second side of the semiconductor substrate facing away from the scale;
- an adhesive agent bonding the light source to the transmitting grating, said adhesive agent being adapted to conduct light of the light source to the transmitting grating;
- and
- an opaque filling material adapted for filling portions of the blind hole.
A measuring system, comprising:
- a scale which carries a graduation;
- a scanning head including:
- a semiconductor substrate having a first side facing the scale;
- a plurality of photodetectors disposed on the first side of the semiconductor substrate, the photodetectors patterned and integrated in the semiconductor substrate;
- a hole formed in the semiconductor substrate, the hole edged on the first side by a transmitting grating symmetrically aligned with respect to the photodetectors;
- and
- a light source disposed on a side of the transmitting grating facing away from the scale;
- wherein the transmitting grating is composed of bars formed from the semiconductor substrate.
A measuring system, comprising:
- a scale which carries a graduation;
- a scanning head including:
- a semiconductor substrate having a first side facing the scale;
- a plurality of photodetectors disposed on the first side of the semiconductor substrate, the photodetectors patterned and integrated in the semiconductor substrate;
- a hole formed in the semiconductor substrate, the hole edged on the first side by a transmitting grating symmetrically aligned with respect to the photodetectors, the transmitting grating composed of metal bars formed from a metallization layer applied to the semiconductor substrate;
- a light source disposed on a side of the transmitting grating facing away from the scale;
- and
- a passivation layer arranged over an arrangement of an oxide layer and a metallization layer.
A measuring system, comprising:
- a scale which carries a graduation;
- a scanning head including:
- a semiconductor substrate having a first side facing the scale;
- a plurality of photodetectors disposed on the first side of the semiconductor substrate, the photodetectors patterned and integrated in the semiconductor substrate;
- a hole formed in the semiconductor substrate, the hole edged on the first side by a transmitting grating symmetrically aligned with respect to the photodetectors;
- a light source disposed on a side of the transmitting grating facing away from the scale;
- a base plate for holding the light source, said base plate being disposed on a second side of the semiconductor substrate facing away from the scale;
- an adhesive agent bonding the light source to the transmitting grating, said adhesive agent being adapted to conduct light of the light source to the transmitting grating;
- and
- an opaque filling material adapted for filling portions of the hole.
The measuring system as recited in claim 27, wherein the carrier is made of glass and the coating is made of a conductive material, and wherein the coating has electrically conductive portions.
Dependencies are inferred from the claim text.