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US 6,603,037 B2Granted
Ester compounds
AssigneesShin-Etsu Chemical Co., Ltd., Matsushita Electric Industrial Co., Ltd., Central Glass Company, Limited
InventorsYuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura, Kazuhiko Maeda, Michitaka Ootani, Haruhiko Komoriya
Life of this patent
Estimating the term…
Abstract
Acrylic esters containing fluorine at α-position and having an alkoxymethyl group introduced into the ester side chain thereof are novel. Polymers obtained from the acrylic esters are improved in transparency, acid elimination and substrate adhesion and are used to formulate chemically amplified resist compositions for lithographic microfabrication.
Claims2
An ester compound of the following general-formula (1):
- wherein R1 is a fluorine atom or a straight, branched or cyclic alkyl group of 1 to 15 carbon atoms having at least one fluorine atom, and R2 is a straight, branched or cyclic alkyl group of 1 to 15 carbon atoms which may be separated by an oxygen atom.
Dependencies are inferred from the claim text.