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US 6,603,033 B2Granted
Organotitanium precursors for chemical vapor deposition and manufacturing method thereof
AssigneeKorea Institute of Science and Technology
InventorKyoungja Woo
Life of this patent
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Abstract
The invention comprises an organotitanium precursor formed from a β-ketoester and a titanium glycolate, and dimer precursors formed from a reaction of the above organotitanium precursor with alcohol, which are used as sources of titanium dioxide for metal-organic chemical vapor deposition (MOCVD).
Claims6
A di-nuclear organotitanium precursor of Formula 2
- wherein R1 and R2 are each selected from the group consisting of a straight- or branched chain alkyl group each having 1-8 carbon atoms, a cycloalkyl group, a phenyl group and a benzyl group;
- and
- R3 is a straight- or branched chain alkylene group having 2-13 carbon atoms, and R4 is a straight chain alkyl group having 1-8 carbon atoms.
A method for manufacturing the organotitanium precursor of Formula 1, comprising the steps of:
- (1) reacting a titanium tetraalkoxide, Ti(OR)4, wherein R is a straight- or branched chain alkyl group having 1-4 carbon atoms, with diol of Formula 3;
- (2) adding a β-ketoester of Formula 4 to the reaction intermediate resulting in step (1), to form a reaction product;
- and
- (3) removing unnecessary by-product ROH and any solvent if used in step 1 from the reaction product and distilling under reduced pressure;
- wherein R1 and R2, are each selected from the group consisting of a straight- or branched chain alkyl group each having 1-8 carbon atoms, a cycloalkyl group, a phenyl group and a benzyl group;
- and
- R3 is a straight- or branched chain alkylene group having 2-13 carbon atoms;
- HO—R3—OH Formula 3
- wherein R3 is a straight- or branched chain alkylene group having 2-13 carbon atoms;
- wherein R1 and R2 are each selected from the group consisting of a straight- or branched chain alkyl group each having 1-8 carbon atoms, a cycloalkyl group, a phenyl group and a benzyl group.
7 more elements
Dependencies are inferred from the claim text.