Wafer processing method
AssigneesWaferMasters, Inc., Tokyo Electron Limited
InventorsHiromitsu Kuribayashi, Woo Sik Yoo
Life of this patent
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Abstract
A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a loading station which employs rotational motion to move a wafer carrier into a load lock. The wafer processing system includes a robot having extension, rotational, and vertical motion for accessing vertically mounted modules. The robot is internally cooled and has a heat resistant end-effector, making the robot compatible with high temperature semiconductor processing.
Claims6
A method for a semiconductor wafer comprising:
- rotating a platform configured to include a semiconductor wafer carrier containing a semiconductor wafer from a first position to a second position;
- raising the semiconductor wafer carrier into a load lock;
- moving the semiconductor wafer from the semiconductor wafer carrier and into a reactor;
- moving the semiconductor wafer from the reactor and into the semiconductor wafer carrier;
- lowering the semiconductor wafer carrier from the load lock;
- and
- rotating the platform including the semiconductor wafer carrier out of the second position.
A method for processing a semiconductor wafer comprising:
- rotating a platform having a semiconductor wafer carrier disposed thereon from a first position to a second position where said semiconductor wafer carrier is moveable into a load lock;
- moving a semiconductor wafer from the semiconductor wafer carrier into a reactor;
- processing the semiconductor wafer;
- moving the semiconductor wafer from the reactor and into the semiconductor wafer carrier;
- and
- rotating the semiconductor wafer carrier from the second position.
A method for moving a wafer carrier into a load lock comprising:
- rotating a platform including a wafer carrier from a first position to a second position;
- and
- raising the wafer carrier into the load lock.
Dependencies are inferred from the claim text.