Glass sheet with conductive film, method of manufacturing the same, and photoelectric conversion device using the same

A glass sheet with a conductive film, comprising:

• a glass sheet;
• a conductive film formed on the glass sheet, containing tin oxide as a main component;
• and
• an undercoating film between the glass sheet and the conductive film,
• wherein a chlorine concentration in the conductive film is 0.11 wt. % or lower, and a fluorine concentration is equal to or higher than the chlorine concentration, and
• the conductive film is formed so that the glass sheet with a conductive film has a light transmittance of at least 79% with respect to incident light with a wavelength of 550 nm entering from a side of the glass sheet when the glass sheet is a soda-lime silica glass sheet with a thickness of 5 mm, and the conductive film has a sheet resistance of 20 Ω/sq. or lower.

A glass sheet with a conductive film, comprising:

• a glass sheet;
• and
• a conductive film formed on the glass sheet, containing tin oxide as a main component and having a thickness of at least 400 nm,
• wherein the conductive film is formed by thermally decomposing a mixed gas containing vapor of an organic tin compound, oxygen, and water vapor, a total amount of the oxygen and the water vapor is at least 14 moles to one mole of tin atoms contained in the organic tin compound, and the conductive film has an average absorptance of 4.5% or less in a wavelength region between 400 nm and 800 nm.