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US 6,602,542 B2Granted
Device for cleaning an article
AssigneeSiemens Aktiengesellschaft
InventorGebhard D{overscore (o)}pper
Life of this patent
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Abstract
The surface of an article with a metallic base body is cleaned. A plasma comprising electrically positively charged ions is generated, and the ions are accelerated toward the article, so that they come into contact with the base body for cleaning purposes. To do this, an electron beam is directed onto the base body. The outgoing flux of electrons which come into contact with the base body is controlled by the base body being connected to a reference potential via a switch of at a fixed, adjustable or regulated frequency.
Claims7
A device for cleaning an article, comprising:
- a housing defining a substrate chamber;
- a substrate guide disposed in said substrate chamber;
- a substrate holder for holding an article connected to said substrate guide in a mechanically fixed and electrically insulated manner;
- an electrical outgoing line connected to said substrate holder, and a switch connected in said electrical outgoing line for selectively connecting said substrate holder to a reference potential;
- and
- an electron beam gun for generating an electron beam directed onto the article.
3 more elements
Dependencies are inferred from the claim text.