Method for treating waste gas containing fluorochemical
AssigneeEbara Corporation
InventorYoichi Mori
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Abstract
A method for decomposing a fluorine-containing compound by contacting an exhaust gas 1 containing a fluorine-containing compound, such as C2F6, with aluminum oxide 3, such as γ-alumina, which has been heated to a high temperature of, for example, 800° C. to 900° C. There may be such a necessary or larger number of moles of H2 that the fluorine atoms in the fluorine-containing compound become HF. The method has a high decomposition rate of a fluorine-containing compound, a long life, and involves minimal occurrence of CO.
Claims14
A method for decomposing a fluorine-containing compound in an exhaust gas by contacting the exhaust gas containing the fluorine-containing compound with aluminum oxide at a high temperature enough to decompose the fluorine-containing compound, and in the presence of such a necessary or larger number of moles of a hydrogen gas (H2) that the fluorine atoms in the fluorine-containing compound become HF, and in the presence of an oxygen gas whose amount is not less than the number of moles of the hydrogen gas.
Dependencies are inferred from the claim text.