Chemical-mechanical planarization slurries and powders and methods for using same
AssigneeSuperior MicroPowders LLC
InventorsMark J. Hampden-Smith, Toivo T. Kodas, James Caruso, Daniel J. Skamser, Quint H. Powell
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Abstract
Chemical-mechanical planarization slurries and methods for using the slurries wherein the slurry includes abrasive particles. The abrasive particles have a small particle size, narrow size distribution and a spherical morphology and the particles are substantially unagglomerated.
Claims42
A chemical mechanical planarization slurry, comprising a liquid carrier and from about 0.5 to about 60 weight percent of abrasive particles comprising a first abrasive compound selected from the group consisting of Al2O3, CeO2 and ZrO2 dispersed throughout said liquid carrier, wherein said abrasive particles are substantially spherical and have a weight average particle size of from about 0.1 to 3 μm and a particle size distribution wherein at least about 90 weight percent of said particles are not larger than twice said average particle size, wherein said abrasive particles are composite abrasive particles comprising said first abrasive compound and a second abrasive compound.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles have a weight average particle size of from about 0.1 μm to about 3 μm and wherein said abrasive particles are coated abrasive particles, wherein said slurry comprises first coated abrasive particles of a first abrasive compound and second coated abrasive particles of a second abrasive compound.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles have a weight average particle size of from about 0.1 μm to about 3 μm and wherein said abrasive particles are coated abrasive particles, wherein said coated abrasive particles comprise a metal oxide coating.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles have a weight average particle size of from about 0.1 μm to about 3 μm and wherein said abrasive particles are coated abrasive particles, wherein said coated abrasive particles comprise a CeO2 coating.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles have a weight average particle size of not greater than about 3 μm and wherein said abrasive particles are composite abrasive particles comprising a first abrasive compound and a second phase, wherein said second phase is a second abrasive compound.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles have a weight average particle size of not greater than about 3 μm and wherein said abrasive particles are composite abrasive particles comprising a first abrasive compound and a second phase, wherein said composite abrasive particles comprise a first abrasive compound selected from the group consisting of Al2O3 and SiO2 and said second phase is CeO2.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles are substantially spherical hollow particles having a weight average particle size of from about 0.1 μm to about 3 μm.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles comprise a phosphor compound and have a weight average particle size of not greater than about 3 μm.
A chemical mechanical planarization slurry, comprising a liquid carrier and abrasive particles dispersed throughout said liquid carrier, wherein said abrasive particles have a weight average particle size of not greater than about 3 μm and wherein said abrasive particles are composite abrasive particles comprising a first abrasive compound and a luminescent compound.
Dependencies are inferred from the claim text.