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US 6,602,397 B1Granted
Method for producing a filter
AssigneeNFT Nanofiltertechnik GmbH
InventorWilfried Hofmann
Life of this patent
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Abstract
A method for the production of filters in which a blank of n- or p-doped etchable semiconductor material is connected as an anode or a cathode according to doping. The method includes contacting a first side of the blank with an etching solution in which a counterelectrode is arranged to electrochemically etch the first side, and supplying activation energy to generate minority charge carriers to the blank during the etching process. The activation energy supplied per unit time is reduced with increasing etching progress.
Claims17
A method for the production of filters comprising
- a) connecting a blank of n- or p-doped etchable semiconductor material as an anode or a cathode according to doping;
- b) contacting a first side of the blank with an etching solution in which a counterelectrode is arranged to electrochemically etch the first side;
- and
- c) supplying activation energy to generate minority charge carriers to the blank during the etching process, the activation energy supplied per unit time being reduced with increasing etching progress.
1 more element
Dependencies are inferred from the claim text.