Plasma confinement by use of preferred RF return path
AssigneeLam Research Corporation
InventorEric H. Lenz
Life of this patent
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Abstract
A confinement assembly for confining a discharge within an interaction space of a plasma processing apparatus comprising a stack of rings and at least one electrically conductive member. The rings are spaced apart from each other to form slots therebetween and are positioned to surround the interaction space. At least one electrically conductive member electrically couples each ring. The electrically conductive member contacts each ring at least at a point inside of the outer circumference of each ring.
Claims7
A plasma processing apparatus having a top electrode, a bottom eletrode, an interaction space confined between the top electrode and the bottom electrode, said plasma processing apparatus comprising:
- a stack of confinement rings, made of electrically insulating material, spaced apart from each other to form slots therebetween and positioned to surround the interaction space, each confinement ring having at least one cavity formed on the surface thereof;
- a focus ring positioned to surround the bottom electrode;
- an electrically conductive member passing through each of said cavity of said stack of confinement rings, a top of said conductive member electrically coupled to the top electrode, said electrically conductive member is grounded at a bottom thereof.
A plasma processing chamber having a top electrode for processing a substrate, the plasma processing chamber comprising:
- a chuck for supporting the substrate during plasma processing;
- a focus ring assembly substantially encircling said chuck;
- a stack of confinement rings, made of electrically insulating material, spaced apart from each other to form slots therebeteen, said stack of confinement rings surrounding an interaction space defined between the top electrode and said chuck;
- each confinement ring having at least one cavity formed on the surface thereof, and
- at least one electrically conductive member passing through each of said cavity of said stack of confinement rings, a top of said at least one conductive member electrically coupled to the top electrode, said electrically conductive member is grounded at a bottom thereof.
Dependencies are inferred from the claim text.