Apparatus and method for processing a substrate

A substrate-processing apparatus, comprising:

• a substrate-processing chamber for processing a web substrate therein;
• a substrate takeup chamber having a substrate takeup bobbin and an interleaf delivery bobbin provided therein, wherein the web substrate processed in said substrate-processing chamber is transported into said substrate takeup chamber where the web substrate and an interleaf delivered from said interleaf delivery bobbin are alternately wound in a roll form on said substrate takeup bobbin;
• and
• a mechanism, disposed within said substrate takeup chamber, for detecting transport abnormality of the interleaf in said substrate takeup chamber, the abnormality due to slacking abnormality in the interleaf, adhesion abnormality in the interleaf or revolution abnormality in winding or unwinding the interleaf.

A substrate-processing apparatus, comprising:

• a substrate delivery chamber having a substrate delivery bobbin and an interleaf takeup bobbin provided therein, said substrate delivery bobbin having a roll comprising a web substrate and an interleaf alternately wound in a roll form thereon;
• a substrate-processing chamber in which the web substrate is subjected to desired processing;
• a substrate takeup chamber having a substrate takeup bobbin and an interleaf delivery bobbin provided therein,
• wherein in said substrate delivery chamber, the web substrate and the interleaf are continuously delivered from said substrate delivery bobbin while the web substrate delivered is transported into said substrate-processing chamber and the interleaf delivered is wound on said interleaf takeup bobbin;
• and in said substrate takeup chamber, the web substrate transported from said substrate-processing chamber and an interleaf delivered from said interleaf delivery bobbin are alternately wound in a roll form on said substrate takeup bobbin;
• and
• a mechanism, disposed within the apparatus, for detecting transport abnormality of the interleaf at least either in said substrate delivery chamber or in said substrate takeup chamber, the abnormality due to slacking abnormality in the interleaf, adhesion abnormality in the interleaf or revolution abnormality in winding or unwinding the interleaf.