Ceramic film and method of manufacturing the same, semiconductor device, and piezoelectric device
AssigneeSeiko Epson Corporation
InventorsEiji Natori, Koichi Furuyama, Yuzo Tasaki
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Abstract
A method of manufacturing a ceramic film includes a step of forming a ceramic film 30 by crystallizing a raw material body 20. The raw material body 20 contains different types of raw materials in a mixed state. The different types of raw materials differ from one another in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials. According to this manufacturing method, a surface morphology of the ceramic film can be improved.
Claims46
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials differ from one another in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials differ from one another in crystal structures produced from the raw materials.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials are individually crystallized at least at an initial stage of crystallization.
A method of manufacturing a ceramic film comprising a step of forming a ceramic film by crystallizing a raw material body,
- wherein the raw material body is crystallized into a plurality of phases.
A method of manufacturing a ceramic film comprising:
- a step of forming a ceramic film by crystallizing a ceramic raw material liquid which includes a first raw material liquid and a second raw material liquid,
- wherein the first raw material liquid is used to produce a ferroelectric having a Bi-based layered perovskite structure;
- and
- wherein the second raw material liquid is used to produce an ABO oxide in which Bi is provided in the A site.
A method of manufacturing a ceramic film comprising:
- a step of forming a ceramic film by crystallizing a ceramic raw material liquid which includes a third raw material liquid and a fourth raw material liquid,
- wherein the third raw material liquid is used to produce a PZT ferroelectric;
- and
- wherein the fourth raw material liquid is used to produce an ABC oxide in which Pb is provided in the A site.
A method of manufacturing a ceramic film comprising:
- a step of forming a ceramic film by crystallizing a ceramic raw material liquid which includes a fifth raw material liquid and a sixth raw material liquid,
- wherein the fifth raw material liquid is used to produce a ferroelectric having a Bi-based layered perovskite structure or a PZT ferroelectric;
- and
- wherein the sixth raw material liquid is used to produce an ABO oxide in which Ge is provided in the B site.
A method of manufacturing a ceramic film comprising:
- a step of forming a raw material body layer in which a plurality of raw material layers are layered;
- and
- a step of forming a ceramic film by crystallizing the raw material body layer,
- wherein an uppermost raw material layer in the raw material body layer has a crystallization temperature lower than a crystallization temperature of a lower raw material layer which is in contact with the uppermost raw material layer, and produces crystals having no layered structure.
A method of manufacturing a ceramic film comprising:
- a step of forming a raw material body layer which includes a raw material laminate in which a first raw material layer, a second raw material layer, and a third raw material layer are layered in that order;
- and
- a step of forming a ceramic film by crystallizing the raw material body layer,
- wherein the second raw material layer has a crystallization temperature lower than crystallization temperatures of the first and third raw material layers.
A method of manufacturing a ceramic film comprising:
- a step of forming a raw material body layer in which a plurality of raw material layers are layered;
- and
- a step of forming a ceramic film by crystallizing the raw material body layer,
- wherein an uppermost raw material layer in the raw material body layer has a crystallization temperature higher than a crystallization temperature of a lower raw material layer which is in contact with the uppermost raw material layer.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body, the ceramic film being a ferroelectric film,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials differ from one another in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body, the ceramic film being a ferroelectric film,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials differ from one another in crystal structures produced from the raw materials.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body, the ceramic film being a ferroelectric film,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials are individually crystallized at least at an initial stage of crystallization.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body, the ceramic film including ferroelectric and paraelectric materials in a mixed state,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials differ from one another in at least one of a crystal growth condition and a crystal growth mechanism in the crystallization of the raw materials.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body, the ceramic film including ferroelectric and paraelectric materials in a mixed state,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials differ from one another in crystal structures produced from the raw materials.
A method of manufacturing a ceramic film, comprising a step of forming a ceramic film by crystallizing a raw material body, the ceramic film including ferroelectric and paraelectric materials in a mixed state,
- wherein the raw material body includes raw materials in a mixed state;
- and
- wherein the raw materials are individually crystallized at least at an initial stage of crystallization.
Dependencies are inferred from the claim text.