Plant for producing semiconductor products
AssigneeInfineon Technologies AG
InventorBernhard Heinemann
Life of this patent
Estimating the term…
Abstract
A plant for producing semiconductor products that includes at least one clean room having a floor and a plurality of production units that are configured in the clean room. The plurality of the production units define processing locations for processing semiconductor products. The processing locations are located near the floor of the clean room. The plant also includes an air supply system for directly feeding in feed air at the processing locations. The circulation of feed air and waste air caused by the force of gravity is utilized so that feed air is made available with little energy expenditure.
Claims36
A plant for producing semiconductor products, comprising:
- at least one clean room having a floor;
- a plurality of production units disposed in said at least one clean room, said plurality of said production units defining processing locations for processing the semiconductor products, said processing locations located near said floor of said clean room;
- and
- an air supply system for directly feeding in feed air at said processing locations through said floor of said clean room.
A plant for producing semiconductor products, comprising:
- at least one clean room having a ceiling for waste air to be led out and a floor;
- a plurality of production units disposed in said at least one clean room, said plurality of said production units defining processing locations for processing the semiconductor products, said processing locations located near said floor of said clean room;
- and
- an air supply system for directly feeding in feed air at said processing locations through said floor of said clean room;
- at least one of said plurality of said production units being constructed with a ceiling through which waste air is led out.
Dependencies are inferred from the claim text.