Narrow-pitch connector, electrostatic actuator, piezoelectric actuator, ink-jet head, ink-jet printer, micromachine, liquid crystal panel, and electronic apparatus

A micro machine, comprising a first substrate on which a moving mechanism portion and a plurality of external terminals with a narrow pitch are formed, characterized in that:

• said micro machine further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal electrodes respectively to prevent the terminal electrodes from being shorted;
• and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

A piezoelectric actuator comprising a first substrate on which a piezoelectric element and a plurality of external terminals with a narrow pitch are formed, characterized in that:

• said actuator further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal respectively to prevent the terminal electrodes from being shorted electrodes;
• and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

An electrostatic actuator comprising a first substrate on which an electrostatic oscillator and a plurality of external terminals with a narrow pitch are formed, characterized in that:

• said actuator further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal electrodes respectively to prevent the terminal electrodes from being shorted, and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

An ink jet head comprising a first substrate on which a piezoelectric element and a plurality of external terminals with a narrow pitch are formed, and functioning to eject an ink drop with said piezoelectric element, characterized in that:

• said ink jet head further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal electrodes respectively to prevent the terminal electrodes from being shorted;
• and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

An ink jet head comprising a first substrate on which an electrostatic oscillator and a plurality of external terminals with a narrow pitch are formed, and functioning to eject an ink drop with said electrostatic oscillator, characterized in that:

• said ink jet head further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal electrodes respectively to prevent the terminal electrodes from being shorted;
• and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

An inkjet printer comprising an inkjet head which comprises a first substrate on which a piezoelectric element and a plurality of external terminals with a narrow pitch are formed, characterized in that:

• said ink jet head further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal electrodes respectively to prevent the terminal electrodes from being shorted;
• and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

An ink jet printer comprising an ink jet head which comprises a first substrate on which an electrostatic oscillator and a plurality of external terminals with a narrow pitch are formed, characterized in that:

• said ink jet head, further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the, surface, for electrically connecting the first terminal electrodes with the,second terminal electrodes;
• and grooves cut in the surface between the first terminal electrodes respectively to prevent the terminal electrodes from being shorted;
• and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

A liquid crystal device comprising a liquid crystal sandwiched between a pair of a first substances of which a plurality of external terminals with a narrow pitch are formed on a surface, characterized in that:

• said liquid crystal device further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal electrodes respectively to prevent the terminal electrodes from being shorted;
• and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.

An electronic appliance comprising a liquid crystal device, characterized in that:

• said liquid crystal device comprises a liquid crystal sandwiched between a pair of first substrates of which a plurality of external terminals with a narrow pitch are formed on a surface
• said liquid crystal device further comprises a second substrate having edge portions, said second substrate is provided with:
• a plurality of closely spaced first terminal electrodes arranged on a surface of the substrate along an edge portion;
• a plurality of more widely spaced second terminal electrodes arranged on the surface along another edge portion;
• connecting wires formed on the surface, for electrically connecting the first terminal electrodes with the second terminal electrodes;
• and grooves cut in the surface between the first terminal electrode respectively to prevent the terminal electrodes from being shorted, and
• the first terminal electrodes is spaced to correspond to the external terminals with narrow pitch on the first substrate, and connected to the external terminals.