Apparatus for cleaning a wafer with shearing stress from slab with curved portion
AssigneeMacronix International Co., Ltd.
InventorsMing-Chung Liang, Shin-Yi Tsai
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Abstract
An apparatus for cleaning a semiconductor wafer is disclosed to substantially improve the efficiency of the cleaning process, and reduce the quantity of cleaning solvent used. The apparatus includes a rotating table for supporting the wafer, a rotation device to rotate the rotation table, a movable or stationary curved-slab for scrubbing the surface of the wafer efficiently, a cleaning nozzle for applying a cleaning solvent or stripper on the surface of the wafer, and a resistance wall for preventing the cleaning solvent spun out from the wafer to pollute the cleaning room.
Claims10
An apparatus for cleaning a semiconductor wafer, said apparatus comprising:
- a table for supporting the wafer;
- a rotation device connected with said table for rotating said table to an specific angular velocity;
- at least a cleaning head placed above said wafer for spraying cleaning solvent on the surface of said wafer;
- and
- a slab with a curved portion radially extending from the wafer center outward for resisting said cleaning solvent directly spun out said wafer, wherein said slab being set above said wafer a distance to provide shearing stress on said wafer for cleaning said wafer, and said distance related to said specific angular velocity.
An apparatus for cleaning a semiconductor wafer, said apparatus comprising:
- a table for supporting the wafer;
- a rotation device connected with said table for rotating said table to an specific angular velocity;
- at least a cleaning head placed above said wafer for spraying cleaning solvent on the surface of said water;
- and
- a slab with a curved portion radially extending from the wafer center outward for resisting said cleaning solvent directly spun out said wafer, wherein said slab being placed above said wafer with a tilt angle defined as an inclination angle and said tilted slab may provide shearing stress on said wafer for cleaning said wafer and said tilt angle related to said angular velocity.
Dependencies are inferred from the claim text.