Formation of interconnections to microfluidic devices
AssigneeSandia Corporation
InventorsCarolyn M. Matzke, Carol I. H. Ashby, Leonardo Griego
Life of this patent
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Abstract
A method is disclosed to form external interconnections to a microfluidic device for coupling of a fluid or light or both into a microchannel of the device. This method can be used to form optical or fluidic interconnections to microchannels previously formed on a substrate, or to form both the interconnections and microchannels during the same process steps. The optical and fluidic interconnections are formed parallel to the plane of the substrate, and are fluid tight.
Claims38
A microfluidic device, comprising:
- (a) a substrate having at least one microchannel formed therein;
- (b) at least one external interconnection to the microchannel formed substantially parallel to a surface of the substrate by a microcapillary tubing or an optical fiber located within an elongate trench formed in the substrate proximate to the microchannel and connected thereto;
- and
- (c) a covering layer comprising silicon oxynitride deposited over the substrate to cover the trench and thereby adhere, at least in part, the microcapillary tubing or optical fiber to the substrate.
An optical or fluidic interconnection to a microchannel formed in a substrate, comprising:
- (a) an elongate trench formed in the substrate proximate to the microchannel and connected thereto, with the trench being aligned substantially parallel to a surface of the substrate wherein the microchannel is formed;
- (b) a microfluidic tubing or optical fiber located within the trench and adhered to the sides and bottom of the trench with an adhesive disposed in the trench;
- and
- (c) a fluid-tight covering formed over at least a portion of the trench, with the fluid-tight covering comprising a layer of silicon oxynitride.
A method for forming an interconnection to a microchannel on a substrate, comprising steps for:
- (a) forming an elongate trench below a surface of the substrate near an edge thereof proximate to the microchannel, with the trench being sized to receive one end of a microcapillary tubing or an optical fiber, and with one end of the trench being connected to the microchannel;
- (b) adhering the end of the microcapillary tubing or optical fiber within the trench with an adhesive;
- (c) depositing a sacrificial material within a portion of the trench not occupied by the microcapillary tubing or optical fiber;
- (d) depositing a layer of silicon oxynitride over the surface of the substrate, with the layer of silicon oxynitride forming a fluid-tight covering over the trench and over the end of the microcapillary tubing or optical fiber located within the trench;
- and
- (e) removing the sacrificial material from the trench.
A method for forming a microfluidic device on a substrate, comprising steps for:
- (a) forming a microchannel on the substrate, and forming at least one elongate trench connected to the microchannel, with each trench being located near an edge of the substrate and being sized to receive one end of a microcapillary tubing or optical fiber;
- (b) adhering the end of the microcapillary tubing or optical fiber within the trench with an adhesive;
- (c) depositing a sacrificial material within the microchannel and within a portion of the trench not occupied by the microcapillary tubing or optical fiber;
- (d) depositing a layer of silicon oxynitride over the surface of the substrate, with the layer of silicon oxynitride forming a fluid-tight covering over the microchannel and trench, and over the end of the microcapillary tubing or optical fiber located within the trench;
- and
- (e) removing the sacrificial material from the microchannel and from the trench.
Dependencies are inferred from the claim text.