Substrate managing system and substrate storing system
AssigneeCanon Kabushiki Kaisha
InventorsKen Matsumoto, Takashi Nakahara
Life of this patent
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Abstract
A substrate managing system includes a reading device for reading information recorded on a substrate, and an information processing device for performing management of the substrate on the basis of the information, wherein the reading device reads information as recorded on an end face of the substrate. At least a portion of a substrate container is made of a transparent material for optical reading of information as recorded on a substrate kept stored in the container.
Claims13
A rectangular-substrate managing system, comprising:
- a reader, arranged to read information recorded on an end face of a substrate having a rectangular shape;
- and
- a data processor, arranged to perform management of the rectangular substrate on the basis of the recorded information,
- wherein the rectangular substrate has a pattern surface on which a pattern to be transferred is formed, wherein the end face of the rectangular substrate, having the information recorded thereon, is plain and is perpendicular to the pattern surface, and wherein said reader reads the information recorded on the end face of the substrate without moving the substrate in a direction along a plane perpendicular to the end face of the substrate.
A substrate cassette, having a side face, at least a portion of which is made of a transparent material for enabling optical reading of information as recorded on an end face of a rectangular substrate stored in said cassette, without moving the substrate in a direction along a plane perpendicular to the end face of the substrate, wherein the side face of said cassette is made approximately parallel to the end face of the substrate.
A rectangular-substrate storing system, comprising:
- a storer, arranged to store therein plural substrates each having a rectangular shape, at storing positions arrayed along a direction perpendicular to the surface of each substrate;
- and
- a reader, arranged to read information recorded on an end face of a desired substrate as kept stored while relatively moving a reading position and the storing position of that substrate;
- wherein the rectangular substrates are reticles or photomasks each having a pattern surface having a transfer pattern formed thereon, and an end face which is plain and is perpendicular to the pattern surface, and wherein said reader reads the information recorded on the end face of the desired substrate without moving the substrate in a direction along a plane perpendicular to the end face of the substrate.
A substrate managing system, comprising:
- a reticle storing container, having a side face, at least a portion of which is made of a transparent material for enabling optical reading of information as recorded on an end face of a rectangular substrate stored in said container;
- and
- a reader for reading the information of the reticle, stored in said container, through the transparent material and without moving the reticle in a direction along a plane perpendicular to the end face of the reticle having the information recorded thereon.
A device manufacturing method, comprising the steps of:
- reading information recorded on an original having a pattern;
- and
- printing, by exposure, the pattern of the original onto a workpiece to be exposed, on the basis of the information;
- wherein in said reading step the information is read through a transparent portion of a cassette in which the original is stored.
A device manufacturing method, comprising the steps of:
- reading information recorded on an end face of an original having a pattern, without moving the original in a direction along a plane perpendicular to the end face of the original;
- and
- transferring, by exposure, the pattern of the original onto a workpiece on the basis of the information;
- wherein the original has a rectangular pattern surface on which a pattern to be transferred is formed, and wherein the end face of the original having the information recorded thereon is plain and is perpendicular to the pattern surface.
Dependencies are inferred from the claim text.