Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber
AssigneeApplied Materials, Inc.
InventorsJohn Holland, Michael Barnes, Steve S. Y. Mak, Patrick Leahey, Jonathan D. Mohn
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Abstract
A method and apparatus for use in conjunction with a plasma reaction chamber provide both throttling functionality and independent vacuum isolation for a turbomolecular pump. A throttle valve provides for precise reaction chamber pressure regulation, and a gate valve prevents extended exposure of the turbomolecular pump to atmospheric conditions during cleaning or other maintenance operations. The throttle valve and the gate valve may be actuated independently.
Claims13
A method of exhausting a plasma reaction chamber, said method comprising:
- throttling at least one pump in communication with the exhaust of a plasma reaction chamber;
- and
- isolating at least one other pump in communication with the exhaust of a plasma reaction chamber independently of said throttling.
A valve assembly for use in a plasma reaction chamber exhaust system, said valve assembly comprising:
- an upstream port for receiving an output of said reaction chamber;
- a low vacuum port for communicating a low vacuum pressure condition to said reaction chamber;
- a high vacuum port for communicating a high vacuum pressure condition to said reaction chamber;
- a throttle valve associated with said upstream port for regulating mass flow from said plasma reaction chamber;
- and
- a gate valve for sealing said high vacuum port.
A system comprising:
- an upstream port for receiving an output of a plasma reaction chamber;
- a throttle valve for regulating mass flow from said plasma reaction chamber;
- a low vacuum port for communicating a low vacuum pressure condition to said reaction chamber;
- a high vacuum port for communicating a high vacuum pressure condition to said plasma reaction chamber;
- and
- a gate valve for sealing said high vacuum port.
Dependencies are inferred from the claim text.