Micromechanical inertial sensor having increased pickoff resonance damping

A micromechanical tuning fork gyroscope adapted to sense rotation about a first axis, the micromechanical tuning fork gyroscope comprising:

• first and second proof masses operably connected to mechanical ground and adapted to vibrate along a second axis substantially orthogonal to the first axis, said proof masses also being movable along a third axis substantially orthogonal to the first and second axes in response to rotation about the first axis;
• a plurality of pickoff plates in at least partial alignment with respective proof masses and capacitively coupled thereto such that capacitance established between said pickoff plates and said proof masses provides a measure of movement of said proof masses along the third axis;
• at least one voltage source electrically connected to said pickoff plates;
• and
• a plurality of resistive elements disposed in series between said at least one voltage source and respective pickoff plates to increase pickoff resonance damping of the micromechanical tuning fork gyroscope.

A micromechanical inertial sensor adapted to sense rotation about a first axis, the micromechanical inertial sensor comprising:

• a substrate;
• first and second proof masses spaced apart from and mechanically connected to said substrate, said proof masses adapted to vibrate along a second axis substantially orthogonal to the first axis, said proof masses also being movable along a third axis substantially orthogonal to the first and second axes in response to rotation about the first axis;
• a plurality of pickoff plates disposed upon said substrate in at least partial alignment with respective proof masses, said pickoff plates spaced from said proof masses by a gap that varies in response to movement of said proof masses along the third axis;
• at least one voltage source electrically connected to said pickoff plates;
• and
• a plurality of resistive elements disposed in series between the at least one voltage source and respective pickoff plates, said resistive elements being sized between 10 kiloohms and 10 megohms.