US 6,590,698 B1 · Ultraviolet laser apparatus and exposure apparatus using same

Abstract

An ultraviolet laser apparatus has a laser generating single-wavelength light between infrared and visible, a fiber optical amplifier for amplifying the laser light, and a converting portion converting the amplified laser light into single-wavelength ultraviolet light, using a non-linear optical crystal. An exposure apparatus transfers a pattern image of a mask onto a substrate and has light source including a laser apparatus for emitting laser light having a single wavelength, a first fiber optical amplifier for amplifying the laser light, a light dividing device for dividing or branching the amplified laser light into plural lights, and second fiber optical amplifiers for amplifying the plural divided or branched lights, respectively; and a transmission optical system for transmitting the laser light emitted from the light source to the exposure apparatus.

Claims87

Dependent claims

An ultraviolet laser apparatus comprising:

a laser generating portion having a single-wavelength oscillating laser, that generates laser light having a single wavelength within a wavelength range from an infrared band to a visible band;
a light dividing device that divides or branches the laser light generated from the single-wavelength oscillating laser into plural lights;
an optical amplifier having a fiber optical amplifier that amplifies the plural lights from the light dividing device;
and
a wavelength converting portion having a non-linear optical crystal that wavelength-converts the amplified plural lights into ultraviolet light;
whereby ultraviolet light having a single wavelength is generated.

3 more elements

Dependencies are inferred from the claim text.

Ultraviolet laser apparatus and exposure apparatus using same

Life of this patent

Ultraviolet laser apparatus and exposure apparatus using same

Life of this patent

Abstract

Claims87