Hybrid MEMS fabrication method and new optical MEMS device

A hybrid method for fabricating micro electro mechanical system (MEMS) devices, comprising:

• mounting a handle layer adjacent to a layer of MEMS structural material;
• building up layers of structural and sacrificial material on said layer of MEMS structural material by surface micromachining;
• mounting drive electronics to said layers of structural and sacrificial material;
• removing said handle layer from said MEMS structural material by grinding;
• and
• dissolving away said sacrificial material.

A hybrid method for fabricating micro electro mechanical system (MEMS) devices, comprising:

• mounting a handle layer adjacent to a layer of MEMS structural material;
• building up layers of structural and sacrificial material on said layer of MEMS structural material by surface micromachining;
• mounting drive electronics to said layers of structural and sacrificial material by flip-chip mounting;
• removing sad handle layer from said MEMS structural material;
• and
• dissolving away said sacrificial material.

A hybrid method of fabricating optical micro electro mechanical system (MEMS) devices, comprising:

• mounting a handle layer adjacent to a mirror layer, to hold and protect said mirror layer;
• building up layers of structural and sacrificial materials on said mirror layer using surface micromachining, said structural material forming MEMS structures;
• mounting drive electronics to said layers of sacrificial and structural material, said drive electronics mounted so that a bias can be applied to said MEMS structures;
• removing said handle layer from said mirror layer;
• and
• dissolving away said sacrificial material, freeing said MEMS structures to operate under said bias.

An optical micro electro mechanical system (MEMS) device fabricated using a hybrid fabrication process, comprising:

• a mirror fabricated using bulk micromachining;
• a substrate with drive electronics to activate said mirror;
• and
• a spring structure and an electrode fabricated using surface micromachining techniques, said spring structure connected between said substrate and mirror, and holding said mirror above said substrate, said electrode mounted on said substrate between said mirror and said substrate, a bias across said mirror and said electrode causing said mirror to be drawn toward said electrode.

An array of optical micro electro mechanical system (MEMS) devices, comprising:

• a plurality of optical MEMS devices, each comprising;
• mirror fabricated using bulk micromachining;
• a spring structure and an electrode fabricated using surface micromachining techniques, said spring structure connected to said mirror;
• a linking framework attached to said optical MEMS devices to link them adjacent to one another, each said spring structure and electrode connected to said framework, said electrode between said framework and said mirror;
• and
• a substrate with drive electronics mounted to said linking framework to apply a bias across spring structure and electrode causing said mirror to be drawn toward said electrode.

A hybrid method for fabricating micro electro mechanical system (MEMS) devices, comprising:

• building up layers of structural and sacrificial material on a layer of bulk micromachining material by surface micromachining, said layers of structural material and said layer of bulk micromachining material forming a MEMS device;
• mounting drive electronics to said layers of structural material;
• etch micromachining said layer of bulk micromachining material;
• and
• dissolving away said sacrificial material to allow said MEMS device to move freely.